# Fileset

[paper.pdf](https://mdr.nims.go.jp/filesets/4514ec44-7f69-45f3-98fb-fa2112b2489d/download)

## Creator

[Takayoshi Oshima](https://orcid.org/0000-0001-8550-9735)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Wet etching of (−102) β-Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    with tetramethylammonium hydroxide (TMAH)](https://mdr.nims.go.jp/datasets/4763abf9-f812-49ef-b7a8-d4b9b7db8a5c)

## Fulltext