# Fileset

[EBL_JJAP-250507.docx](https://mdr.nims.go.jp/filesets/422b36e6-8284-40c1-8c33-2ced5c0e13e4/download)

## Creator

Kohei Tuzuku, [Masataka Imura](https://orcid.org/0000-0002-4236-9549), [Hironori Okumura](https://orcid.org/0000-0002-5464-9169)

## Rights

This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics.  IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it.  The Version of Record is available online at https://doi.org/10.35848/1347-4065/adde9a.[Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International](https://creativecommons.org/licenses/by-nc-nd/4.0/)

## Other metadata

[Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification](https://mdr.nims.go.jp/datasets/2d145c06-e49c-4dab-9450-63544c254c51)

## Fulltext