# Fileset

[data_for_the_plots.zip](https://mdr.nims.go.jp/filesets/3d855eca-9ed6-4d20-8064-801c2938a375/download)

## Creator

[Takayoshi Oshima](https://orcid.org/0000-0001-8550-9735)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Wet etching of (−102) β-Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    with tetramethylammonium hydroxide (TMAH)](https://mdr.nims.go.jp/datasets/4763abf9-f812-49ef-b7a8-d4b9b7db8a5c)

## Fulltext

data_for_the_plots/Fig_1_etch_rate_90C_1h_bar_data.csvSurface,Etch_rate_nm_per_h_mean,Etch_rate_nm_per_h_std(100) Sn,115.3,9.3(010) Sn,69.5,3.6(001) Sn,169.4,3.4(-201) Sn,98.5,10.1(-102) UID,2370.1,14.3(-102) Sn,2530.6,27.6data_for_the_plots/Fig_2_etch_rate_arrhenius_data.csvTemperature_C,Time_h,InvT_1000_per_K,Sn_depth_nm_mean,Sn_depth_nm_std,UID_depth_nm_mean,UID_depth_nm_std50,2.0,3.09,175.8,2.4,166.3,5.169,1.5,2.92,673.8,5.2,624.0,8.490,1.0,2.75,2530.6,27.0,2362.6,13.3data_for_the_plots/Fig_4_side-etch_polar.csv  angle  side etch pixcel  scal bar um  scale bar pixcel  calibration coefficient  side etch length  side etch rate  0  22  0.5  201  0.002487562  0.054726368  0.054726368  10  135  1  503  0.001988072  0.268389662  0.268389662  20  190  1  455  0.002197802  0.417582418  0.417582418  30  219  1  503  0.001988072  0.435387674  0.435387674  40  160  1  503  0.001988072  0.318091451  0.318091451  50  57  1  503  0.001988072  0.11332008  0.11332008  60  50  1  503  0.001988072  0.099403579  0.099403579  70  44  1  503  0.001988072  0.087475149  0.087475149  80  36  1  503  0.001988072  0.071570577  0.071570577  90  29  0.5  201  0.002487562  0.072139303  0.072139303  100  38  1  503  0.001988072  0.07554672  0.07554672  110  49  1  503  0.001988072  0.097415507  0.097415507  120  52  1  503  0.001988072  0.103379722  0.103379722  130  77  1  503  0.001988072  0.153081511  0.153081511  140  158  1  503  0.001988072  0.314115308  0.314115308  150  225  1  503  0.001988072  0.447316103  0.447316103  160  206  1  503  0.001988072  0.409542744  0.409542744  170  115  1  503  0.001988072  0.228628231  0.228628231  180  33  0.5  201  0.002487562  0.082089552  0.082089552  190  141  1  503  0.001988072  0.280318091  0.280318091  200  182  1  455  0.002197802  0.4  0.4  210  221  1  503  0.001988072  0.439363817  0.439363817  220  162  1  503  0.001988072  0.322067594  0.322067594  230  68  1  503  0.001988072  0.135188867  0.135188867  240  48  1  503  0.001988072  0.095427435  0.095427435  250  37  1  503  0.001988072  0.073558648  0.073558648  260  37  1  503  0.001988072  0.073558648  0.073558648  270  29  0.5  201  0.002487562  0.072139303  0.072139303  280  37  1  503  0.001988072  0.073558648  0.073558648  290  39  1  503  0.001988072  0.077534791  0.077534791  300  45  1  503  0.001988072  0.089463221  0.089463221  310  66  1  503  0.001988072  0.131212724  0.131212724  320  167  1  503  0.001988072  0.332007952  0.332007952  330  221  1  503  0.001988072  0.439363817  0.439363817  340  202  1  503  0.001988072  0.401590457  0.401590457  350  124  1  503  0.001988072  0.246520875  0.246520875  360  22  0.5  201  0.002487562  0.054726368  0.054726368