# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/33a6d3ab-60fd-41d9-96f0-a97108de1593/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/320479a6-713f-49b7-a941-a1fde0c3ab4a)

## Fulltext