# Fileset

[README.pdf](https://mdr.nims.go.jp/filesets/25788da1-b17b-4eaf-9cfe-144f1090a958/download)

## Creator

[YAGYU, Shinjiro](https://orcid.org/0000-0002-9825-5719)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[Sample data for X-ray visualization of local bending of the lattice planes (XR-V-LBLP)](https://mdr.nims.go.jp/datasets/c3f281b9-e170-40cb-b6c6-c5cd6fb32657)

## Fulltext

Sample data for X-ray visualization of local bendingof the lattice planes (XR-V-LBLP)  Overview  We have improved synchrotron X-ray diffraction imaging, a type of X-ray diffraction topography(XRDT), and have proposed a new method to visualize the local bending of lattice planes (XR-V-LBLP). Data can be used to perform calculations for the proposed method. Data contain two ormore reflections at different azimuthal angles of the sample, and each azimuthal data containstwo-dimensional diffraction images of the substrate obtained by rotating the angle of incidence. The dataset description  The folder name: "Substrate Type" + _ +"Sample Name" + _ + "Size" + _ + "Azimuth of Incidence".Example: GaN_n1_4_0Substrate Type: GaN,Sample Name: n1,Size: 4 inches,Azimuth of Incidence: 0The incident azimuths are 0: 0°, 120: 120°, m120: -120°. The angle of incidence is taken in the left-hand system (clockwise). Sizes are 4: 4", 2: 2", m: 7.5x15af://n0af://n3af://n6Figure 1 shows a schematic of the data contained in the folders. In each orientation folder, thereare two-dimensional image data (TIF format) with different incident angles and data withoutincident X-rays (dark data). Also included is a file (angle.txt) that associates the angle with the datafile name. The unit of the angle is arcsec.File Name Azimuth angle Size Reference(DOI)GaN_n1_4_0GaN_n1_4_120GaN_n1_4_m1200120-1204 10.1039/C8CE01440JGaN_n2_2_0GaN_n2_2_12001202 10.7567/APEX.11.081002GaN_n3_m_0GaN_n3_m_1200120m 10.1039/C9CE00463GFigure 2 shows a diagram of the sample and the detector in relation to the direction of incident X-rays. Since the origin position of the detector is inverted in the x-axis direction relative to the x-rayincidence direction, the data obtained is also inverted. In actual analysis, the image needs to beinverted.Figure 3 shows a sample installation direction with respect to the X-ray incident direction. Type 1is a 2 or 4-inch wafer, and type 2 is an m-surface wafer. List of Dataset and reference  af://n21 Sample data for X-ray visualization of local bending of the lattice planes (XR-V-LBLP) Overview The dataset description List of Dataset and reference