# Fileset

[2023_Koike_SiGe_TE_device_draft-TM-初期投稿.pdf](https://mdr.nims.go.jp/filesets/217239c0-d3c1-45c3-ae3b-29df9e170f06/download)

## Creator

S. Koike, R. Yanagisawa, L. Jalabert, R. Anufriev, M. Kurosawa, [T. Mori](https://orcid.org/0000-0003-2682-1846), M. Nomura

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Planar-type SiGe thermoelectric generator with double cavity structure](https://mdr.nims.go.jp/datasets/ac2ddd30-ae49-411d-97d3-e8c3d85f4b8f)

## Fulltext