# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/1b162f07-bc46-4106-9fad-fdab8e47f5ee/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/058bac7d-8b88-4593-b583-0c548fafb5a3)

## Fulltext