# Fileset

[Pulsed laser deposition of ZnO MgxZn1-xO superlattices for quantum cascade laser applications.pdf](https://mdr.nims.go.jp/filesets/11244d9d-d47d-42d1-b6ee-38baa8af4c10/download)

## Creator

Tatsuya Masuda, Toshihiro Sato, Norihiko Sekine, Iwao Hosako, Gen-Ichi Hatakoshi, Hideomi Koinuma, Ryota Takahashi

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Pulsed laser deposition of ZnO/MgxZn1-xO superlattices for quantum cascade laser applications](https://mdr.nims.go.jp/datasets/5df8907f-4c88-48d3-808e-738975ed0e4c)

## Fulltext