# Fileset

[1-s2.0-S2666845925002120-main.pdf](https://mdr.nims.go.jp/filesets/0fb37f57-ebee-4556-ada7-0ffcd5d9daab/download)

## Creator

Moataz Mekawy, Kazuya Iida, [Akitsu Shigetou](https://orcid.org/0000-0001-7054-3674), [Jin Kawakita](https://orcid.org/0000-0002-4821-4150)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[Surface modification of aluminum on a silicon chip by citric acid treatment](https://mdr.nims.go.jp/datasets/2294a610-7d6e-4f51-8468-d3df319f4746)

## Fulltext