# Fileset

[JSAP 2025 Abstract-chen_Liao.doc](https://mdr.nims.go.jp/filesets/0b09be67-5a4b-4304-8e37-424f1192df8d/download)

## Creator

[Guo Chen](https://orcid.org/0009-0004-9263-5616), [Wen Zhao](https://orcid.org/0000-0001-8159-8195), [Zhaozong Zhang](https://orcid.org/0009-0003-8745-4469), [Satoshi KOIZUMI](https://orcid.org/0000-0003-4961-5658), [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Developing nickel-catalyzed graphene/diamond heterostructures for  MEMS applications](https://mdr.nims.go.jp/datasets/cf605ba7-0301-4b49-bb0a-d5d8663d73a4)

## Fulltext

Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applicationsNational Institute for Materials Science○(P) Guo Chen, Wen Zhao, Zhaozong Zhang, Satoshi Koizumi, and Meiyong Liao*E-mail: chen.guo@nims.go.jpMicroelectromechanical systems (MEMS) demand materials that not only possess excellent mechanical strength and thermal stability, but also provide high electrical and optical performance. Single-crystal diamond (SCD) is an ideal material owing to its extreme hardness, chemical inertness, and exceptional thermal conductivity. However, its insulating nature limits its functionality in active sensing. In contrast, graphene—a two-dimensional (2D) material—exhibits outstanding electrical conductivity, carrier mobility, and broadband optical absorption, but relies heavily on substrate support in device applications. By integrating graphene with diamond, a graphene-on-diamond (GOD) heterostructure could offer a platform combining the superior mechanical and thermal properties of diamond with the multifunctionality of graphene. However, to date, MEMS devices based on GOD structures have not yet been successfully fabricated. This all-carbon technology holds great promise for next-generation MEMS sensors that require both mechanical durability and multifunctional responsiveness.In this work, we achieved the in-situ growth of graphene on diamond (100) substrates via rapid thermal annealing (RTA) at 950°C for 2 minutes, as an initial step towards the fabrication of GOD heterostructures for MEMS sensor applications. Thin nickel films (10 to 60 nm) were deposited on diamond substrates by an E-gun evaporator and served as catalytic layers for graphene growth. After annealing, Ni films were chemically removed using aqueous iron (III) chloride (FeCl₃) solution. As shown in Fig. 1, Raman spectrum of the GOD sample exhibited prominent G (~1580 cm⁻¹), 2D (~2700 cm⁻¹), and diamond (~1332 cm⁻¹) peaks, confirming the successful formation of layered graphene on diamond. The full width at half maximum (FWHM) of the 2D band was approximately 77 cm⁻¹, and the I2D/IG intensity ratio was about 0.58, indicating that the graphene layers formed on the diamond substrate consisted of multilayer graphene. Raman spectrum (bottom) of the bare diamond (100) substrate was measured as a reference for comparison. These results offers great potential for robust and multifunctional diamond  MEMS sensing devices.Fig. 1. (a) The Raman spectra of diamond (100) substrate (bottom) and the graphene/diamond heterostructure (top). (b) The optical image of the measured location of graphene layers on diamond.