No.	Category	Item	Unit	Description
1	Temperature Analysis	Time (s)	s	Time
2	Temperature Analysis	RawTemp(C)	C	Raw Temperaure
3	Temperature Analysis	Z	pix	Specimen position in z-axis direction
4	Temperature Analysis	X	pix	Specimen position in x-axis direction
5	Temperature Analysis	Y	pix	Specimen position in y-axis direction
6	Temperature Analysis	L		
7	Temperature Analysis	YAG		
8	Temperature Analysis	Adjusted Temp(C)	C	Adjusted Tempareture
9	Temperature Analysis	Offset Temp(C)	C	Offset Temperature
10	Temperature Analysis	Temperature (K)	K	Temperature
				
	Typical file name	(ESL)-"Date"-A.txt