In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF₆ etching

ジャーナル論文

著者

Hitesh Agarwal (author) (この著者で検索)

Hitesh Agarwal ;

Antoine Reserbat-Plantey (author) (この著者で検索)

Antoine Reserbat-Plantey ;

David Barcons Ruiz (author) (この著者で検索)

David Barcons Ruiz ;

Karuppasamy Pandian Soundarapandian (author) (この著者で検索)

Karuppasamy Pandian Soundarapandian ;

Geng Li (author) (この著者で検索)

Geng Li ;

Vahagn Mkhitaryan (author) (この著者で検索)

Vahagn Mkhitaryan ;

Johann Osmond (author) (この著者で検索)

Johann Osmond ;

Helena Lozano (author) (この著者で検索)

Helena Lozano ;

Kenji Watanabe (author) (この著者で検索)

https://orcid.org/0000-0003-3701-8119

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kenji Watanabe ;

Takashi Taniguchi (author) (この著者で検索)

https://orcid.org/0000-0002-1467-3105

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takashi Taniguchi ;

Petr Stepanov (author) (この著者で検索)

Petr Stepanov ;

Frank H L Koppens (author) (この著者で検索)

Frank H L Koppens ;

Roshan Krishna Kumar (author) (この著者で検索)

Roshan Krishna Kumar

キーワード

hexagonal boron nitride (hBN)
, selective etching, van der Waals heterostructures


刊行年月日

2025-10-01

更新時刻

2026-03-03 08:30:26 +0900