Epitaxial growth of phase-pure e-Ga2O3 by halide vapor phase epitaxy
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
;Encarnación G. Víllora (author) (Search by this author)Yoshitaka Matsushita (author) (Search by this author)National Institute for Materials Science
;
Satoshi Yamamoto (author) (Search by this author)National Institute for Materials Science
;
Kiyoshi Shimamura (author) (Search by this author)National Institute for Materials Science
- Keyword
- κ-Ga2O3, ε-Ga2O3, HVPE
- Date published
- 2015-08-28
- Updated at
- 2024-01-30 15:45:38 +0900
HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga 2 O 3
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
;
Yuichi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, (−112), HVPE, HCl gas etching
- Date published
- 2026-12-31
- Updated at
- 2026-07-16 10:12:49 +0900
Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)
;
Takayoshi Oshima (author) (Search by this author)
;
Shiyu Xiao (author) (Search by this author)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
;
;Kazuto Murakami (author) (Search by this author);Katsuhiro Imai (author) (Search by this author)Takahiro Tomita (author) (Search by this author)
- Keyword
- Ga2O3, HVPE, Cr2O3
- Date published
- 2026-02-21
- Updated at
- 2026-02-18 16:30:15 +0900
Halide Vapor Phase Epitaxy of twin-free a-Ga2O3 on sapphire (0001) substrates
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
;Encarnación G. Víllora (author) (Search by this author)Kiyoshi Shimamura (author) (Search by this author)National Institute for Materials Science
- Keyword
- α-Ga2O3, HVPE
- Date published
- 2015-05-01
- Updated at
- 2024-01-22 09:34:09 +0900
Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along -12-10>
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
;Shingo Yagyu (author) (Search by this author)Takashi Shinohe (author) (Search by this author)
- Keyword
- α-Ga2O3, HVPE, dislocation, ELO
- Date published
- 2021-11-07
- Updated at
- 2024-01-30 16:49:49 +0900