Oxygen-termination effect on the surface energy dissipation in diamond MEMS

Journal article

Creator

Keyun Gu (author) (Search by this author)

Keyun Gu ;

Zilong Zhang (author) (Search by this author)

Zilong Zhang ;

Guo Chen (author) (Search by this author)

Guo Chen ;

Jian Huang (author) (Search by this author)

Jian Huang ;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Wen Zhao (author) (Search by this author)

Wen Zhao ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond, MEMS, sensors

Date published

2024-04-18

Updated at

2024-07-09 12:30:27 +0900