Experimental investigation and simulation of SEM image intensity behaviors for developing thickness-controlled S/TEM lamella preparation via FIB-SEM

ジャーナル論文

著者

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Yuanzhao Yao (author) (この著者で検索)

Yuanzhao Yao ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Takashi Sekiguchi (author) (この著者で検索)

Takashi Sekiguchi

キーワード

transmission electron microscopy, scanning electron microscopy, focused ion beam

刊行年月日

2025-08-01

更新時刻

2026-01-31 16:30:04 +0900