キーワード: scanning electron microscopy
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Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM.pdf
Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM
ジャーナル論文
著者
Jun Uzuhashi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Tadakatsu Ohkubo (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Kazuhiro Hono (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
atom probe tomography, focused ion beam, scanning electron microscopy, automation
刊行年月日
2023-02-19
更新時刻
2025-02-23 22:51:16 +0900