Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

ジャーナル論文

著者

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Kazuhiro Hono (author) (この著者で検索)

https://orcid.org/0000-0001-7367-0193

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kazuhiro Hono

キーワード

atom probe tomography, focused ion beam, scanning electron microscopy, automation

刊行年月日

2023-02-19

更新時刻

2025-02-23 22:51:16 +0900