Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition

ジャーナル論文

著者

Rintaro Minami (author) (この著者で検索)

University of Tsukuba a Department of Applied Physics

Rintaro Minami ;

Eiji Kita (author) (この著者で検索)

Eiji Kita ;

Chiharu Mitsumata (author) (この著者で検索)

Chiharu Mitsumata ;

Hideto Yanagihara (author) (この著者で検索)

Hideto Yanagihara

キーワード

Machine learning, principal component analysis (PCA), reactive magnetron sputtering, plasma emission spectrum, Mössbauer spectroscopy

刊行年月日

2025-12-31

更新時刻

2025-09-10 16:30:38 +0900