Patternable laser-oxidized Ta2O5 dielectric and TaS2 contact for optimizing subthreshold swing of MoS2 field-effect transistors

Article

Creator

Kuan-Cheng Lu ; Pen-Yuan Shih ; Pin-Hsien Lin ; Shih-Hao Wu ; Kimitoshi Kono ; Wen-Bin Jian ; Yu-Han Lin ; Yo-Yao Ho ; Ching-Hwa Ho ; Shin-Yuan Wang ; Chao-Hsin Chien ; Ching-Yu Chiang ; Shu-Jui Chang ; Yu-Che Huang ; Kenji Watanabe ; Takashi Taniguchi ; Kazuhito Tsukagoshi ; Chenming Hu

Keyword

Ta2O5, TaS2, subthreshold swing, MoS2, field-effect transistors

Date published

2026-02-24

Updated at

2026-03-04 16:30:07 +0900