In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF₆ etching

Journal article

Creator

Hitesh Agarwal (author) (Search by this author)

Hitesh Agarwal ;

Antoine Reserbat-Plantey (author) (Search by this author)

Antoine Reserbat-Plantey ;

David Barcons Ruiz (author) (Search by this author)

David Barcons Ruiz ;

Karuppasamy Pandian Soundarapandian (author) (Search by this author)

Karuppasamy Pandian Soundarapandian ;

Geng Li (author) (Search by this author)

Geng Li ;

Vahagn Mkhitaryan (author) (Search by this author)

Vahagn Mkhitaryan ;

Johann Osmond (author) (Search by this author)

Johann Osmond ;

Helena Lozano (author) (Search by this author)

Helena Lozano ;

Kenji Watanabe (author) (Search by this author)

https://orcid.org/0000-0003-3701-8119

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kenji Watanabe ;

Takashi Taniguchi (author) (Search by this author)

https://orcid.org/0000-0002-1467-3105

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takashi Taniguchi ;

Petr Stepanov (author) (Search by this author)

Petr Stepanov ;

Frank H L Koppens (author) (Search by this author)

Frank H L Koppens ;

Roshan Krishna Kumar (author) (Search by this author)

Roshan Krishna Kumar

Keyword

hexagonal boron nitride (hBN)
, selective etching, van der Waals heterostructures


Date published

2025-10-01

Updated at

2026-03-03 08:30:26 +0900