In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF₆ etching

Article

Creator

Hitesh Agarwal ; Antoine Reserbat-Plantey ; David Barcons Ruiz ; Karuppasamy Pandian Soundarapandian ; Geng Li ; Vahagn Mkhitaryan ; Johann Osmond ; Helena Lozano ; Kenji Watanabe ; Takashi Taniguchi ; Petr Stepanov ; Frank H L Koppens ; Roshan Krishna Kumar

Keyword

hexagonal boron nitride (hBN)
, selective etching, van der Waals heterostructures


Date published

2025-10-01

Updated at

2026-03-03 08:30:26 +0900