Effect of defects on Q factors of single-crystal diamond MEMS resonators

Journal article

Creator

Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

Zilong Zhang ;

Guo Chen (author) (Search by this author)

Guo Chen ;

Keyun Gu (author) (Search by this author)

Keyun Gu ;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond, MEMS, Q factor

Date published

2023-12-31

Updated at

2024-03-05 16:30:18 +0900