Identification of gas species and their concentrations by using sorption kinetics of viscoelastic film

Proceedings

Creator

Kosuke Minami ; Kota Shiba ; Gaku Imamura ; Genki Yoshikawa

Keyword

nanomechanical sensors, sorption kinetics

Date published

2022-05-29

Updated at

2023-12-25 00:37:37 +0900