Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

Article

Creator

Chao Zhuang ; Kosuke Minami ; Kota Shiba ; Genki Yoshikawa

Keyword

Topology optimization, nanomechanical sensors

Date published

2024-01-01

Updated at

2025-01-23 12:30:11 +0900