Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template

Article

Creator

Yuichi Oshima ; Takayoshi Oshima ; Shiyu Xiao ; Kazuto Murakami ; Katsuhiro Imai ; Takahiro Tomita

Keyword

Ga2O3, HVPE, Cr2O3

Date published

2026-02-21

Updated at

2026-02-18 16:30:15 +0900