Predicting the surface roughness of an electrodeposited copper film using a machine learning technique

Article

Creator

Ryo Tamura ; Ryuichi Inaba ; Mami Watanabe ; Yutaro Mori ; Makoto Urushihara ; Kenji Yamaguchi ; Shoichi Matsuda

Keyword

electrodeposited copper film, surface roughness, machine learning

Date published

2024-12-31

Updated at

2024-10-31 16:30:15 +0900