Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Encarnación G. Víllora (author) (Search by this author)

Encarnación G. Víllora ;

Kiyoshi Shimamura (author) (Search by this author)

https://orcid.org/0000-0001-6502-8731

NIMS Researchers Directory SAMURAI

Kiyoshi Shimamura

Keyword

ScN, HVPE

Date published

2014-04-21

Updated at

2024-01-30 16:35:16 +0900