Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
A perspective on diamond MEMS magnetic sensors
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)
;
;Keyun Gu (author) (Search by this author)Masaya Toda (author) (Search by this author)
https://orcid.org/0000-0003-3849-6948
(unauthenticated)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-03-01
- Updated at
- 2025-05-19 16:30:19 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)National Institute for Materials Science;Masaya Toda (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
- Conference paper
- Creator
-
;Zilong Zhang (author) (Search by this author);Zhijian Zhao (author) (Search by this author)Meiyong Liao (author) (Search by this author)
;
;Takahito Ono (author) (Search by this author)Masaya Toda (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-01-19
- Updated at
- 2025-11-13 16:30:04 +0900