Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.

Article

Creator

Kosuke Minami

Keyword

piezoresistive microcantilever, surface stress, topology optimization, nanomechanical sensors, anisotropic materials

Date published

2023-09-01

Updated at

2024-01-05 22:14:00 +0900