Effect of Si addition on epitaxial growth and gas sensing properties of tungsten oxide films

Journal article

Creator

Yutaka Adachi (author) (Search by this author)

https://orcid.org/0000-0003-2666-5521

National Institute for Materials Science

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Yutaka Adachi

Keyword

Tungsten trioxide, Epitaxial film, Si doping, Acetone, Ethanol, Gas selectivity

Date published

2024-05-01

Updated at

2024-05-24 12:30:24 +0900