2 records found. Displaying records 1 to 2.

Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
Conference paper
Creator
Zilong Zhang (author) (Search by this author)
;
Zhijian Zhao (author) (Search by this author)
; ORCID SAMURAI ;
Takahito Ono (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-01-19
Updated at
2025-11-13 16:30:04 +0900
Adv Materials Technologies - 2025 - Zhang - Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging.pdf
Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging at Room Temperature
Journal article
Creator
Zilong Zhang (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Keyun Gu (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhijian Zhao (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Zhengyan Lei (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Yi-Hsiu Kao (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Takahito Ono (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Masaya Toda (author) (Search by this author)
Graduate School of Engineering, Tohoku University
Keyword
Diamond, MEMS, magnetic sensors,
Date published
2025-05-12
Updated at
2025-07-22 12:30:24 +0900
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