Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
- Journal article
- Creator
-
Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
Zilong Zhang (author) (Search by this author)
;
Jian Huang (author) (Search by this author)
https://orcid.org/0000-0002-1268-8899
(unauthenticated)
;
Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, surface conductivity, MEMS
- Date published
- 2025-06-02
- Updated at
- 2025-07-14 12:30:29 +0900
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
- Conference presentation
- Creator
-
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:27 +0900