On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

Journal article

Creator

Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science

Zilong Zhang ;

Wen Zhao (author) (Search by this author)

Wen Zhao ;

Guo Chen (author) (Search by this author)

National Institute for Materials Science

Guo Chen ;

Masaya Toda (author) (Search by this author)

Masaya Toda ;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond, MEMS, Magnetic sensors

Date published

2023-03-27

Updated at

2024-07-04 16:30:34 +0900