Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
- Conference paper
- Creator
-
;Zilong Zhang (author) (Search by this author);Zhijian Zhao (author) (Search by this author)Meiyong Liao (author) (Search by this author)
;
;Takahito Ono (author) (Search by this author)Masaya Toda (author) (Search by this author) - Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-01-19
- Updated at
- 2025-11-13 16:30:04 +0900
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
- Magazine
- Collection
- Research Highlights
- Creator
-
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)National Institute for Materials Science
- Keyword
- GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
- Date published
- 2021-07-13
- Updated at
- 2023-12-26 21:38:08 +0900
Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C
- Conference paper
- Creator
-
;Zilong Zhang (author) (Search by this author);Keyun Gu (author) (Search by this author);Guo Chen (author) (Search by this author)Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2024-05-02
- Updated at
- 2025-01-25 08:30:41 +0900
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
- Conference presentation
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi KOIZUMI (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond,, MEMS
- Date published
- Updated at
- 2026-01-09 11:00:08 +0900
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Tokuyuki Teraji (author) (Search by this author)
;
;Yasuo Koide (author) (Search by this author);Masaya Toda (author) (Search by this author)Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-07-28
- Updated at
- 2025-10-28 12:30:23 +0900
A perspective on diamond MEMS magnetic sensors
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)
;
;Keyun Gu (author) (Search by this author)Masaya Toda (author) (Search by this author)
https://orcid.org/0000-0003-3849-6948
(unauthenticated)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-03-01
- Updated at
- 2025-05-19 16:30:19 +0900
Ultra-High-Resolution Thermometer Based on Diamond MEMS
- Conference presentation
- Creator
-
;Wen Zhao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials ScienceTokuyuki Teraji (author) (Search by this author)Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group, National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)Research Center for Electronic and Optical Materials, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-05-22 08:30:40 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (Search by this author)Yasuo Koide (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-04-01
- Updated at
- 2025-07-12 08:30:35 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)National Institute for Materials Science;Masaya Toda (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- Journal article
- Creator
-
;Kotaro Naruse (author) (Search by this author);Naru Kato (author) (Search by this author);Takuma Matsumori (author) (Search by this author);Jun Shlomi (author) (Search by this author);Yoshihiro Midoh (author) (Search by this author);Tetsuya Hirose (author) (Search by this author)Gaku Imamura (author) (Search by this author)National Institute for Materials Science
;
Genki Yoshikawa (author) (Search by this author)National Institute for Materials Science
;
;Constantine Sideris (author) (Search by this author)Noriyuki Miura (author) (Search by this author)
- Keyword
- gas sensor, CMOS, MEMS
- Date published
- 2025-02-16
- Updated at
- 2025-12-25 16:21:05 +0900