On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)National Institute for Materials Science;Masaya Toda (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
- Conference presentation
- Creator
-
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:27 +0900