Fabrication of β -Ga ₂ O ₃ /air-gap structures on (010) β -Ga ₂ O ₃ by wet etching in tetramethylammonium hydroxide (TMAH)

Journal article

Creator

Takayoshi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8550-9735

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Takayoshi Oshima

Keyword

Ga2O3, TMAH, wet etching, MEMS

Date published

2025-11-01

Updated at

2025-11-27 08:30:13 +0900