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Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Article
Creator
TANUMA, Shigeo
Keyword
XPS
,
quantitative surface analysis
,
X-ray photoelectron spectroscopy
,
Auger electron spectroscopy
,
relative sensitivity factor
,
ISO
,
International Organization for Standardization
,
AES
Date published
2005-12-28
Updated at
2024-01-05 22:11:34 +0900
Keyword
AES
(1)
Auger electron spectroscopy
(1)
ISO
(1)
International Organization for Standardization
(1)
X-ray photoelectron spectroscopy
(1)
XPS
(1)
quantitative surface analysis
(1)
relative sensitivity factor
(1)
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