4 records found. Displaying records 1 to 4.
Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam epitaxy
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
Elaheh Ahmadi (author) (Search by this author)
https://orcid.org/0000-0002-8330-9366
(unauthenticated)
;
;Stephen Kaun (author) (Search by this author);Feng Wu (author) (Search by this author)James S Speck (author) (Search by this author) - Keyword
- β-Ga2O3, MBE
- Date published
- 2018-01-01
- Updated at
- 2024-01-22 09:42:02 +0900
Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
Takayoshi Oshima (author) (Search by this author)National Institute for Materials Science
- Keyword
- β-Ga2O3, etching
- Date published
- 2023-08-01
- Updated at
- 2024-08-21 08:30:30 +0900
Homoepitaxial growth of (-102) β-Ga2O3 by halide vapor phase epitaxy
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
Takayoshi Oshima (author) (Search by this author)National Institute for Materials Science
- Keyword
- β-Ga2O3, HVPE
- Date published
- 2023-10-01
- Updated at
- 2024-08-31 08:31:17 +0900
Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction
- Journal article
- Creator
-
Yuichi Oshima (author) (Search by this author)National Institute for Materials Science
;
;Elaheh Ahmadi (author) (Search by this author);Stefan C. Badescu (author) (Search by this author);Feng Wu (author) (Search by this author)James S. Speck (author) (Search by this author)
- Keyword
- β-Ga2O3, composition, atom probe
- Date published
- 2016-06-01
- Updated at
- 2024-01-24 09:26:50 +0900