Analytical modeling and decoupling of humidity effects in nanomechanical sensing based on sorption kinetics and viscoelastic stress relaxation

Article

Creator

Meng-Qun Feng ; Kosuke Minami ; Yingcheng Zhou ; Genki Yoshikawa

Keyword

nanomechanical sensors, sorption kinetics, viscoelastic stress relaxation, humidity

Date published

2025-06-09

Updated at

2025-11-13 16:30:30 +0900