High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer

Article

Creator

Tanuma, Shigeo ; Ogiwara, Toshiya ; Kim, Kyung Joong ; Nagatomi, Takaharu

Keyword

Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder

Date published

2016-04-03

Updated at

2024-01-05 22:13:47 +0900