Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging at Room Temperature

ジャーナル論文

著者

Zilong Zhang (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Zilong Zhang ;

Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Keyun Gu ;

Zhijian Zhao (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Zhijian Zhao ;

Zhengyan Lei (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Zhengyan Lei ;

Yi-Hsiu Kao (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Yi-Hsiu Kao ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Meiyong Liao ;

Takahito Ono (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Takahito Ono ;

Masaya Toda (author) (この著者で検索)

Graduate School of Engineering, Tohoku University

Masaya Toda

キーワード

Diamond, MEMS, magnetic sensors,

刊行年月日

2025-05-12

更新時刻

2025-07-22 12:30:24 +0900