Predicting the surface roughness of an electrodeposited copper film using a machine learning technique

論文

著者

Ryo Tamura ; Ryuichi Inaba ; Mami Watanabe ; Yutaro Mori ; Makoto Urushihara ; Kenji Yamaguchi ; Shoichi Matsuda

キーワード

electrodeposited copper film, surface roughness, machine learning

刊行年月日

2024-12-31

更新時刻

2024-10-31 16:30:15 +0900