Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition

Journal article

Creator

Rintaro Minami (author) (Search by this author)

a Department of Applied Physics, University of Tsukuba

Rintaro Minami ;

Eiji Kita (author) (Search by this author)

Eiji Kita ;

Chiharu Mitsumata (author) (Search by this author)

Chiharu Mitsumata ;

Hideto Yanagihara (author) (Search by this author)

Hideto Yanagihara

Keyword

Machine learning, principal component analysis (PCA), reactive magnetron sputtering, plasma emission spectrum, Mössbauer spectroscopy

Date published

2025-12-31

Updated at

2025-09-10 16:30:38 +0900