Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition

Article

Creator

Rintaro Minami ; Eiji Kita ; Chiharu Mitsumata ; Hideto Yanagihara

Keyword

Machine learning, principal component analysis (PCA), reactive magnetron sputtering, plasma emission spectrum, Mössbauer spectroscopy

Date published

2025-12-31

Updated at

2025-09-10 16:30:38 +0900