2 records found.
Wet etching of (−102) β-Ga 2 O 3 with tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, wet etching, TMAH
- Date published
- 2026-12-31
- Updated at
- 2026-06-11 15:11:01 +0900
Original dataset for ID 208 Ga2O3 in Thermophysical Property Database
- Dataset
- Collection
- Thermophysical Property Original Datasets
- Creator
-
;Takehiko Ishikawa (depositor) (Search by this author)Japan Aerospace Exploration AgencyMasashi Ishii (editor) (Search by this author)National Institute for Materials Science
- Keyword
- Ga2O3, Ceramic, Density, ISS-ELF, Electrostatic Levitation, collection - Thermophys Datasets
- Date published
- Updated at
- 2024-03-30 18:40:44 +0900