Quasi-1D edge contact to hBN-encapsulated multilayered graphene by SF6 dry etch

Journal article

Creator

Ryuichi Tsuchikawa (author) (Search by this author)

Ryuichi Tsuchikawa ;

David Castro (author) (Search by this author)

David Castro ;

Swastik Ballav (author) (Search by this author)

Swastik Ballav ;

Michael S. Lodge (author) (Search by this author)

Michael S. Lodge ;

Kenji Watanabe (author) (Search by this author)

https://orcid.org/0000-0003-3701-8119

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kenji Watanabe ;

Takashi Taniguchi (author) (Search by this author)

https://orcid.org/0000-0002-1467-3105

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takashi Taniguchi ;

Masa Ishigami (author) (Search by this author)

Masa Ishigami ;

Robert E. Peale (author) (Search by this author)

Robert E. Peale

Keyword

Twisted bilayer graphene, Contact resistance, Hexagonal boron nitride

Date published

2025-05-13

Updated at

2026-07-03 13:07:31 +0900