Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator

論文

著者

Keyun Gu ; Zilong Zhang ; Jian Huang ; Yasuo Koide ; Satoshi Koizumi ; Meiyong Liao

キーワード

Diamond, surface conductivity, MEMS

刊行年月日

2025-06-02

更新時刻

2025-07-14 12:30:29 +0900