Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition

論文

著者

Rintaro Minami ; Eiji Kita ; Chiharu Mitsumata ; Hideto Yanagihara

キーワード

Machine learning, principal component analysis (PCA), reactive magnetron sputtering, plasma emission spectrum, Mössbauer spectroscopy

刊行年月日

2025-12-31

更新時刻

2025-09-10 16:30:38 +0900