Surface modification of aluminum on a silicon chip by citric acid treatment

ジャーナル論文

著者

Moataz Mekawy (author) (この著者で検索)

Moataz Mekawy ;

Kazuya Iida (author) (この著者で検索)

Kazuya Iida ;

Akitsu Shigetou (author) (この著者で検索)

https://orcid.org/0000-0001-7054-3674

NIMS Researchers Directory SAMURAI

Akitsu Shigetou ;

Jin Kawakita (author) (この著者で検索)

https://orcid.org/0000-0002-4821-4150

NIMS Researchers Directory SAMURAI

Jin Kawakita

キーワード

Aluminum, Surface treatment, Citric acid, Sensor, Moisture

刊行年月日

2025-08-18

更新時刻

2025-08-25 12:30:35 +0900