A design methodology of crystal growth furnace and process aided by two-step optimization using machine learning models and genetic algorithm

論文

著者

Hiroyuki Tanaka ; Kentaro Kutsukake ; Kota Asakura ; Takuto Kojima ; Xin Liu ; Noritaka Usami

キーワード

Optimization, machine learning, genetic algorithm, crystal growth, process informatics

刊行年月日

2025-12-31

更新時刻

2026-02-27 12:30:07 +0900