Surface modification of aluminum on a silicon chip by citric acid treatment

Article

Creator

Moataz Mekawy ; Kazuya Iida ; Akitsu Shigetou ; Jin Kawakita

Keyword

Aluminum, Surface treatment, Citric acid, Sensor, Moisture

Date published

2025-08-18

Updated at

2025-08-25 12:30:35 +0900