Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic 111> orientations.

ジャーナル論文

著者

Kosuke Minami (author) (この著者で検索)

https://orcid.org/0000-0003-4145-1118

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Kosuke Minami

キーワード

piezoresistive microcantilever, surface stress, topology optimization, nanomechanical sensors, anisotropic materials

刊行年月日

2023-09-01

更新時刻

2024-01-05 22:14:00 +0900